標題: | Undoped InP sandwiched InGaAs p-i-n photodetector with partially p-doped photoabsorption layer grown on linearly graded metamorphic InxGa1-xP buffered GaAs substrate - art. no. 61190L |
作者: | Liao, Yu-Sheng Lin, Gong-Ru Kuo, Hao-Chung Feng, Milton 光電工程學系 Department of Photonics |
關鍵字: | metamorphic;In0.53Ga0.47As;InGaP;GaAs;p-i-n photodiode;receiver;high-power photodiode |
公開日期: | 2006 |
摘要: | A novel top-illuminated In0.53Ga0.47As p-i-n photodiodes, with the partially p-doped photoabsorption layer, grown on GaAs substrate by using a linearly graded metamorphic InxGa1-xP (x graded from 0.49 to 1) buffer layer is reported. The dark current, optical responsivities, noise equivalent power, and operational bandwidth of the MM-PINPD with aperture diameter of 60 mu m are 13 pA, 0.6 A/W, 3.4.10(-15) W/Hz(1/2), and 8 GHz, respectively, at 1550 nm. Under the illumination of 1.2-ps pulse-train, the measured impulse response is 41 ps and the frequency bandwidth is up to 8 GHz with heterodyne beating measurement. The low cost InGaAs photodiode with high current bandwidth product (350 mA center dot GHz, at 10 GHz) and bandwidth-efficient product (4.8 GHz center dot A/W) have been achieved. |
URI: | http://hdl.handle.net/11536/17167 http://dx.doi.org/10.1117/12.645859 |
ISBN: | 0-8194-6161-X |
ISSN: | 0277-786X |
DOI: | 10.1117/12.645859 |
期刊: | Semiconductor Photodetectors III |
Volume: | 6119 |
起始頁: | L1190 |
結束頁: | L1190 |
顯示於類別: | 會議論文 |