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dc.contributor.authorTsui, Bing-Yueen_US
dc.contributor.authorWeng, Chien-Lien_US
dc.contributor.authorChang, Chih-Lienen_US
dc.contributor.authorWei, Jeng-Huaen_US
dc.contributor.authorTsai, Ming-Jinnen_US
dc.date.accessioned2014-12-08T15:25:08Z-
dc.date.available2014-12-08T15:25:08Z-
dc.date.issued2006en_US
dc.identifier.isbn1-4244-0181-Xen_US
dc.identifier.urihttp://hdl.handle.net/11536/17509-
dc.description.abstractContact resistance (R-c) between metal and carbon nanotubes (CNTs) is studied extensively. Metal oxide formation at interface due to oxygen absorption plays very important role. Chemically inert metals such as Pt and Au results in the lowest R-c. Adding Ta into Pt can solve the adhesion issue while keeps low R-c. Those metals can break metal oxide and form metal carbide are also preferred.en_US
dc.language.isoen_USen_US
dc.titleEffect of oxygen absorption on contact resistance between metal and carbon nano tubes (CNTs)en_US
dc.typeProceedings Paperen_US
dc.identifier.journal2006 International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA), Proceedings of Technical Papersen_US
dc.citation.spage86en_US
dc.citation.epage87en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000239791300031-
Appears in Collections:Conferences Paper


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