0.1 mu m poly-Si thin film transistors for system-on-panel (SoP) applications

Full metadata record

DC Field	Value	Language
dc.contributor.author	Tsui, BY	en_US
dc.contributor.author	Lin, CP	en_US
dc.contributor.author	Huang, CF	en_US
dc.contributor.author	Xiao, YH	en_US
dc.date.accessioned	2014-12-08T15:25:11Z	-
dc.date.available	2014-12-08T15:25:11Z	-
dc.date.issued	2005	en_US
dc.identifier.isbn	0-7803-9268-X	en_US
dc.identifier.uri	http://hdl.handle.net/11536/17583	-
dc.description.abstract	Thin active layer, fully-silicided source/drain (S/D), modified Schottky barrier, high dielectric constant (high-k) gate dielectric, and metal gate technologies are integrated to realize high performance TFTs. Devices with 0.1 mu m channel length were fabricated successfully. Low threshold voltage, low subthreshold swing, high effective mobility, low S/D resistance, high on/off current ratio, and good control of threshold voltage are demonstrated.	en_US
dc.language.iso	en_US	en_US
dc.title	0.1 mu m poly-Si thin film transistors for system-on-panel (SoP) applications	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2005, TECHNICAL DIGEST	en_US
dc.citation.spage	933	en_US
dc.citation.epage	936	en_US
dc.contributor.department	電子工程學系及電子研究所	zh_TW
dc.contributor.department	Department of Electronics Engineering and Institute of Electronics	en_US
dc.identifier.wosnumber	WOS:000236225100213	-
Appears in Collections:	Conferences Paper