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dc.contributor.authorTsui, BYen_US
dc.contributor.authorLin, CPen_US
dc.contributor.authorHuang, CFen_US
dc.contributor.authorXiao, YHen_US
dc.date.accessioned2014-12-08T15:25:11Z-
dc.date.available2014-12-08T15:25:11Z-
dc.date.issued2005en_US
dc.identifier.isbn0-7803-9268-Xen_US
dc.identifier.urihttp://hdl.handle.net/11536/17583-
dc.description.abstractThin active layer, fully-silicided source/drain (S/D), modified Schottky barrier, high dielectric constant (high-k) gate dielectric, and metal gate technologies are integrated to realize high performance TFTs. Devices with 0.1 mu m channel length were fabricated successfully. Low threshold voltage, low subthreshold swing, high effective mobility, low S/D resistance, high on/off current ratio, and good control of threshold voltage are demonstrated.en_US
dc.language.isoen_USen_US
dc.title0.1 mu m poly-Si thin film transistors for system-on-panel (SoP) applicationsen_US
dc.typeProceedings Paperen_US
dc.identifier.journalIEEE INTERNATIONAL ELECTRON DEVICES MEETING 2005, TECHNICAL DIGESTen_US
dc.citation.spage933en_US
dc.citation.epage936en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000236225100213-
Appears in Collections:Conferences Paper