標題: A hybrid classification tree for products of complicated machines in flexible manufacturing systems
作者: Horng, SC
Lin, SY
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: classification;CART;clustering algorithm;ion implanter
公開日期: 2005
摘要: In this paper, we propose a Hybrid Classification Tree (HCT) to classify the products of complicated machines in flexible manufacturing systems. The HCT combines a proposed clustering algorithm with the Classification and Regression Tree (CART) to take the advantage of the constant property of control settings during any process step for a type of product. The proposed clustering algorithm split the data set into terminal clusters using splitting attributes based on a separation matrix and fuzzy rules. The terminal clusters which consist of the data of more than one product will be further classfied using the CART We have tested the HCT on the products of an ion implanter for the vast number of wafers of 26 recipes and compared the classification results and the computation time with the existing software See5 and CART The comparison results show that the HCT retains the classification accuracy of CART while saving 40% training time.
URI: http://hdl.handle.net/11536/17595
ISBN: 0-7803-9298-1
ISSN: 1062-922X
期刊: INTERNATIONAL CONFERENCE ON SYSTEMS, MAN AND CYBERNETICS, VOL 1-4, PROCEEDINGS
起始頁: 3775
結束頁: 3780
Appears in Collections:Conferences Paper