ELLIPSOMETRIC MEASUREMENTS AND ITS ALIGNMENT - USING THE INTENSITY RATIO TECHNIQUE

doi:10.1143/JJAP.34.5016

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	CHAO, YF	en_US
dc.contributor.author	WEI, CS	en_US
dc.contributor.author	LEE, WC	en_US
dc.contributor.author	LIN, SC	en_US
dc.contributor.author	CHAO, TS	en_US
dc.date.accessioned	2014-12-08T15:03:12Z	-
dc.date.available	2014-12-08T15:03:12Z	-
dc.date.issued	1995-09-01	en_US
dc.identifier.issn	0021-4922	en_US
dc.identifier.uri	http://dx.doi.org/10.1143/JJAP.34.5016	en_US
dc.identifier.uri	http://hdl.handle.net/11536/1764	-
dc.description.abstract	Using first-order treatment on azimuth errors of the polarizer (P) and analyzer (A) with respect to the plane of incidence (POI), we construct two intensity ratios around a certain configuration: such as P = +/- pi/4 and A = 0 as compared to A = pi/2. These expressions can be used not only to align the azimuths of the polarizer and analyzer to the POI, hut also to obtain the ellipsometric parameter phi without locating the minimum intensity, BK7 glass and SiO2/Si thin film are ultilized to evaluate this technique.	en_US
dc.language.iso	en_US	en_US
dc.subject	ELLIPSOMETRY	en_US
dc.subject	POLARIMETRY	en_US
dc.subject	REFRACTIVE INDEX	en_US
dc.subject	THIN FILM	en_US
dc.title	ELLIPSOMETRIC MEASUREMENTS AND ITS ALIGNMENT - USING THE INTENSITY RATIO TECHNIQUE	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1143/JJAP.34.5016	en_US
dc.identifier.journal	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS	en_US
dc.citation.volume	34	en_US
dc.citation.issue	9A	en_US
dc.citation.spage	5016	en_US
dc.citation.epage	5019	en_US
dc.contributor.department	交大名義發表	zh_TW
dc.contributor.department	National Chiao Tung University	en_US
dc.identifier.wosnumber	WOS:A1995RX26800080	-
dc.citation.woscount	9	-
顯示於類別：	期刊論文

文件中的檔案：

A1995RX26800080.pdf

若為 zip 檔案，請下載檔案解壓縮後，用瀏覽器開啟資料夾中的 index.html 瀏覽全文。