標題: | THE ELLIPSOMETRIC MEASUREMENTS ON SIO2 BY INTENSITY RATIO TECHNIQUE |
作者: | CHAO, YF WEI, CS LEE, WC LIN, SC 交大名義發表 National Chiao Tung University |
關鍵字: | ELLIPSOMETRY;THIN FILM |
公開日期: | 1994 |
URI: | http://hdl.handle.net/11536/20125 http://dx.doi.org/10.1117/12.186666 |
ISBN: | 0-8194-1589-8 |
DOI: | 10.1117/12.186666 |
期刊: | POLARIZATION ANALYSIS AND MEASUREMENT II |
Volume: | 2265 |
起始頁: | 171 |
結束頁: | 180 |
顯示於類別: | 會議論文 |