標題: Silicon-nitride based micro optical components for optical pickup application
作者: Lee, CH
Yi, C
Tien, CH
Shieh, HPD
光電工程學系
Department of Photonics
關鍵字: micro gratings;polarization beam splitter;optical pickup
公開日期: 2005
摘要: The design and fabrication of micro gratings and polarization beam splitters for potential use in micro optical pickups are presented. Silicon nitride is used as the optical material for its low absorption in the visible wavelength. The micro components are framed by a pop-up poly-silicon mechanism as in the standard surface micromachining technology. The micro grating is a binary phase grating. The diffraction ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455nm and 485nm. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarizing beam splitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode of a micro polarization beam splitter was measured to be more than 98.50%.
URI: http://hdl.handle.net/11536/17651
http://dx.doi.org/10.1117/12.608636
ISBN: 0-8194-5831-7
ISSN: 0277-786X
DOI: 10.1117/12.608636
期刊: Smart Sensors, Actuators, and MEMS II
Volume: 5836
起始頁: 200
結束頁: 207
顯示於類別:會議論文


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