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dc.contributor.authorLee, CHen_US
dc.contributor.authorYi, Cen_US
dc.contributor.authorTien, CHen_US
dc.contributor.authorShieh, HPDen_US
dc.date.accessioned2014-12-08T15:25:16Z-
dc.date.available2014-12-08T15:25:16Z-
dc.date.issued2005en_US
dc.identifier.isbn0-8194-5831-7en_US
dc.identifier.issn0277-786Xen_US
dc.identifier.urihttp://hdl.handle.net/11536/17651-
dc.identifier.urihttp://dx.doi.org/10.1117/12.608636en_US
dc.description.abstractThe design and fabrication of micro gratings and polarization beam splitters for potential use in micro optical pickups are presented. Silicon nitride is used as the optical material for its low absorption in the visible wavelength. The micro components are framed by a pop-up poly-silicon mechanism as in the standard surface micromachining technology. The micro grating is a binary phase grating. The diffraction ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455nm and 485nm. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarizing beam splitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode of a micro polarization beam splitter was measured to be more than 98.50%.en_US
dc.language.isoen_USen_US
dc.subjectmicro gratingsen_US
dc.subjectpolarization beam splitteren_US
dc.subjectoptical pickupen_US
dc.titleSilicon-nitride based micro optical components for optical pickup applicationen_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1117/12.608636en_US
dc.identifier.journalSmart Sensors, Actuators, and MEMS IIen_US
dc.citation.volume5836en_US
dc.citation.spage200en_US
dc.citation.epage207en_US
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:000231822100020-
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