標題: | Micro actuated grating for multi-beam optical pickups - art. no. 66200I |
作者: | Lee, Chi-Hung Chiu, Yi Shieh, Han-Ping D. 光電工程學系 Department of Photonics |
關鍵字: | binary grating;actuator;micro-machining;optical pickup |
公開日期: | 2007 |
摘要: | A stress-induced curved micro actuator with a grating attached at the end is demonstrated for recordable optical storage applications. The actuator and the grating were fabricated using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity from the grating were generated when a voltage is applied to the actuator to switch its position. The single-beam and multi-beam configurations can be used for writing and reading data in the disc, respectively. |
URI: | http://hdl.handle.net/11536/7990 http://dx.doi.org/10.1117/12.738632 |
ISBN: | 978-0-8194-6762-1 |
ISSN: | 0277-786X |
DOI: | 10.1117/12.738632 |
期刊: | Optical Data Storage 2007 |
Volume: | 6620 |
起始頁: | I6200 |
結束頁: | I6200 |
顯示於類別: | 會議論文 |