標題: Micro actuated grating for multi-beam optical pickups - art. no. 66200I
作者: Lee, Chi-Hung
Chiu, Yi
Shieh, Han-Ping D.
光電工程學系
Department of Photonics
關鍵字: binary grating;actuator;micro-machining;optical pickup
公開日期: 2007
摘要: A stress-induced curved micro actuator with a grating attached at the end is demonstrated for recordable optical storage applications. The actuator and the grating were fabricated using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity from the grating were generated when a voltage is applied to the actuator to switch its position. The single-beam and multi-beam configurations can be used for writing and reading data in the disc, respectively.
URI: http://hdl.handle.net/11536/7990
http://dx.doi.org/10.1117/12.738632
ISBN: 978-0-8194-6762-1
ISSN: 0277-786X
DOI: 10.1117/12.738632
期刊: Optical Data Storage 2007
Volume: 6620
起始頁: I6200
結束頁: I6200
顯示於類別:會議論文


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