Micro actuated grating for multi-beam optical pickups - art. no. 66200I

doi:10.1117/12.738632

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Lee, Chi-Hung	en_US
dc.contributor.author	Chiu, Yi	en_US
dc.contributor.author	Shieh, Han-Ping D.	en_US
dc.date.accessioned	2014-12-08T15:10:27Z	-
dc.date.available	2014-12-08T15:10:27Z	-
dc.date.issued	2007	en_US
dc.identifier.isbn	978-0-8194-6762-1	en_US
dc.identifier.issn	0277-786X	en_US
dc.identifier.uri	http://hdl.handle.net/11536/7990	-
dc.identifier.uri	http://dx.doi.org/10.1117/12.738632	en_US
dc.description.abstract	A stress-induced curved micro actuator with a grating attached at the end is demonstrated for recordable optical storage applications. The actuator and the grating were fabricated using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity from the grating were generated when a voltage is applied to the actuator to switch its position. The single-beam and multi-beam configurations can be used for writing and reading data in the disc, respectively.	en_US
dc.language.iso	en_US	en_US
dc.subject	binary grating	en_US
dc.subject	actuator	en_US
dc.subject	micro-machining	en_US
dc.subject	optical pickup	en_US
dc.title	Micro actuated grating for multi-beam optical pickups - art. no. 66200I	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.doi	10.1117/12.738632	en_US
dc.identifier.journal	Optical Data Storage 2007	en_US
dc.citation.volume	6620	en_US
dc.citation.spage	I6200	en_US
dc.citation.epage	I6200	en_US
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	Department of Photonics	en_US
dc.identifier.wosnumber	WOS:000250199900010	-
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