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dc.contributor.authorChiou, JCen_US
dc.contributor.authorKuo, CFen_US
dc.contributor.authorLin, YCen_US
dc.date.accessioned2014-12-08T15:25:43Z-
dc.date.available2014-12-08T15:25:43Z-
dc.date.issued2004en_US
dc.identifier.isbn0-8194-5378-1en_US
dc.identifier.issn0277-786Xen_US
dc.identifier.urihttp://hdl.handle.net/11536/18139-
dc.identifier.urihttp://dx.doi.org/10.1117/12.545378en_US
dc.description.abstractIn this paper, a tilting micromirror device that can achieve designed angle is proposed. A lever structure, driven by electrostatic actuators, was used to enlarge tilting angle. To obtain precise deflecting angle, the lever structure is constrained by the substrate. By applying a voltage, the electrostatic actuators drive the lever down to the substrate such that the micromirror device on the opposite side of the lever structure could be lifted. PolyMUMPs process was used to fabricate proposed micromirror devices. The actuators are simulated to investigate characteristics of the micromirror devices. Experimental results had indicated that the micromirror device could reach 10-degree tilting angle with 80V driving signal with 6.4% relative error compared to designed model.en_US
dc.language.isoen_USen_US
dc.subjectmicro-mirroren_US
dc.subjectleveren_US
dc.subjectPolyMUMPsen_US
dc.titleA tilting micromirror with well-controlled digital angle through constrained lever structureen_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1117/12.545378en_US
dc.identifier.journalMEMS, MOEMS, AND MICROMACHININGen_US
dc.citation.volume5455en_US
dc.citation.spage159en_US
dc.citation.epage165en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000223909200018-
Appears in Collections:Conferences Paper


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