標題: | Correlation between transmission-line-pulsing I-V curve and human-body-model ESD level on low temperature poly-Si TFT devices |
作者: | Ker, MD Hou, CL Chang, CY Chu, FT 電機學院 College of Electrical and Computer Engineering |
公開日期: | 2004 |
摘要: | The relations between human-body-model (HBM) electrostatic discharge (ESD) waveform and transmission line pulsing (TLP) I-V curve on low temperature poly-Si (LTPS) thin film transistor (TFT) have been investigated in this paper. By using ESD zapper and TLP system, the ESD waveforms and TLP I-V curves on the LPTS TFT devices under different device dimensions have been measured. From the experimental results, the turn-on resistances of TFT devices during HBM zapping and TLP stress are almost the same. Such experimental results have shown a good correction between HBM ESD level and TLP measurement on LTPS TFT devices. |
URI: | http://hdl.handle.net/11536/18277 |
ISBN: | 0-7803-8454-7 |
期刊: | IPFA 2004: PROCEEDINGS OF THE 11TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS |
起始頁: | 209 |
結束頁: | 212 |
顯示於類別: | 會議論文 |