標題: | Constructing control process for wafer defects using data mining technique |
作者: | Tong, L Lee, H Huang, CF Lin, CK Yang, CH 工業工程與管理學系 Department of Industrial Engineering and Management |
關鍵字: | wafer defects;c-chart;defect clustering;adaptive control chart;data mining |
公開日期: | 2004 |
摘要: | The wafer defects influence the yield of a wafer. The integrated circuits (IC) manufacturers usually use a Poisson distribution based c-chart to monitor the lot-to-lot wafer defects. As the wafer size increases, defects on wafer tend to cluster. When the c-chart is used, the clustered defects frequently cause erroneous results. The main objective of this study is to develop a hierarchical adaptive control process to monitor the clustered defects effectively and detect the wafer-to-wafer variation and lot-to-lot variation simultaneously using data mining technique. |
URI: | http://hdl.handle.net/11536/18334 |
ISBN: | 7-5062-7342-X |
期刊: | SHAPING BUSINESS STRATEGY IN A NETWORKED WORLD, VOLS 1 AND 2, PROCEEDINGS |
起始頁: | 1125 |
結束頁: | 1129 |
顯示於類別: | 會議論文 |