Title: Petri net-based design of modular supervisors for remotely human control systems
Authors: Lee, JS
Zhou, MC
Hsu, PL
電控工程研究所
Institute of Electrical and Control Engineering
Keywords: human-in-the-loop;Internet-based control systems;modular supervision;Petri nets;rapid thermal processes;and supervisory control
Issue Date: 2004
Abstract: In an Internet-based control system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper extends the remote supervisory scheme in [5] to a modular one so as to reduce the supervisor synthesis complexity. Also, remote human issued commands are guaranteed to meet required specifications. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.
URI: http://hdl.handle.net/11536/18336
ISBN: 4-907764-22-7
Journal: SICE 2004 Annual Conference, Vols 1-3
Begin Page: 1271
End Page: 1276
Appears in Collections:Conferences Paper