Effects of CF(4) plasma treatment on the moisture uptake, diffusion, and WVTR of poly(ethylene terephthalate) flexible films

Abstract

We studied the effects of CF(4) plasma surface treatment on moisture uptake, diffusion, and the water-vapor-transmission-rate (WVTR) of poly(ethylene terephthalate) (PET) films using a CF(4) plasma generated by a radio-frequency (13.56 MHz) reactive ion etcher at 60 W. After CF(4) plasma treatment, moisture uptake in PET film was reduced with increasing treatment time due to (1) lower adsorption of water molecules onto the hydrophobic surface, as confirmed by contact angle measurement and XPS analysis, and (2) reduced diffusion coefficient through the denser fluorinated top-layer as detected by XRR. In addition, the WVTR of untreated PET is found to be 2.7 g/m(2)/day, while a significant reduction (84%) of WVTR to 0.43 g/m(2)/day, is achieved for CF(4) plasma-treated PET film (60 W. 15 min), which alters the surface hydrophobicity (similar to 107 degrees) and simultaneously builds a denser, fluorinated top-layer (47 nm). The surface fluorinated layer has a diffusivity of to 8.7 x 10(-12) m(2)/s and a WVTR of similar to 1.0 x 10(-4) g/m(2)/day based on a series resistance model. (C) 2011 Elsevier B.V. All rights reserved.