標題: | Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes |
作者: | Chiou, JC Lin, YC Wu, SD 電控工程研究所 Institute of Electrical and Control Engineering |
公開日期: | 2002 |
URI: | http://hdl.handle.net/11536/18824 |
ISBN: | 0-7803-7595-5 |
期刊: | 2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST |
起始頁: | 85 |
結束頁: | 86 |
Appears in Collections: | Conferences Paper |