標題: Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes
作者: Chiou, JC
Lin, YC
Wu, SD
電控工程研究所
Institute of Electrical and Control Engineering
公開日期: 2002
URI: http://hdl.handle.net/11536/18824
ISBN: 0-7803-7595-5
期刊: 2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST
起始頁: 85
結束頁: 86
Appears in Collections:Conferences Paper