標題: Impact of airborne molecular contamination to nano-device performance
作者: Yeh, CF
Hsiao, CW
Lin, SJ
Xie, ZM
Kusumi, T
Aomi, H
Kaneko, H
Da, BT
Tsai, MS
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 2002
摘要: In this paper, we detected most airborne molecular contamination (AMC) in present cleanroom and in our specially equipped clean bench through air sampling and wafer sampling experiments. And then we investigate the AMC on device performance under different filter modules. We discovered that the NEUROFINE PTFE filter combines with the chemical filters have excellent controlling ability of metal, organic and inorganic contaminations. We believe that the novel filter combination can be used to further improve device manufacturing environment when device is continuously scaled down to nanometer generation.
URI: http://hdl.handle.net/11536/18871
ISBN: 0-7803-7538-6
期刊: PROCEEDINGS OF THE 2002 2ND IEEE CONFERENCE ON NANOTECHNOLOGY
起始頁: 461
結束頁: 464
Appears in Collections:Conferences Paper