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dc.contributor.authorChiou, JCen_US
dc.contributor.authorLin, YCen_US
dc.contributor.authorChang, YCen_US
dc.date.accessioned2014-12-08T15:26:58Z-
dc.date.available2014-12-08T15:26:58Z-
dc.date.issued2000en_US
dc.identifier.isbn0-8194-3902-9en_US
dc.identifier.issn0277-786Xen_US
dc.identifier.urihttp://hdl.handle.net/11536/19203-
dc.identifier.urihttp://dx.doi.org/10.1117/12.404902en_US
dc.description.abstractThis paper describes the development of a novel, flexible, with appropriate accuracy dynamic characteristics measurement system for optical scanning micromirror. With the system, we can measure dynamic behaviors such as transient response, scan speed, scan angle, scan repeatability, and scan non-linearity of the scanning micromirror devices. Moreover, the optical system performances such as scan spot size and even scan spot intensity can also be obtained.en_US
dc.language.isoen_USen_US
dc.subjectscanning micromirroren_US
dc.subjectscan speeden_US
dc.subjectscan angleen_US
dc.subjectscan non-linearityen_US
dc.subjectoptical performance of micromirroren_US
dc.titleDynamic characteristics measurement system for optical scanning micromirroren_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1117/12.404902en_US
dc.identifier.journalMICROMACHINING AND MICROFABRICATIONen_US
dc.citation.volume4230en_US
dc.citation.spage180en_US
dc.citation.epage186en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000168019300023-
Appears in Collections:Conferences Paper


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