Dynamic characteristics measurement system for optical scanning micromirror

doi:10.1117/12.404902

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Chiou, JC	en_US
dc.contributor.author	Lin, YC	en_US
dc.contributor.author	Chang, YC	en_US
dc.date.accessioned	2014-12-08T15:26:58Z	-
dc.date.available	2014-12-08T15:26:58Z	-
dc.date.issued	2000	en_US
dc.identifier.isbn	0-8194-3902-9	en_US
dc.identifier.issn	0277-786X	en_US
dc.identifier.uri	http://hdl.handle.net/11536/19203	-
dc.identifier.uri	http://dx.doi.org/10.1117/12.404902	en_US
dc.description.abstract	This paper describes the development of a novel, flexible, with appropriate accuracy dynamic characteristics measurement system for optical scanning micromirror. With the system, we can measure dynamic behaviors such as transient response, scan speed, scan angle, scan repeatability, and scan non-linearity of the scanning micromirror devices. Moreover, the optical system performances such as scan spot size and even scan spot intensity can also be obtained.	en_US
dc.language.iso	en_US	en_US
dc.subject	scanning micromirror	en_US
dc.subject	scan speed	en_US
dc.subject	scan angle	en_US
dc.subject	scan non-linearity	en_US
dc.subject	optical performance of micromirror	en_US
dc.title	Dynamic characteristics measurement system for optical scanning micromirror	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.doi	10.1117/12.404902	en_US
dc.identifier.journal	MICROMACHINING AND MICROFABRICATION	en_US
dc.citation.volume	4230	en_US
dc.citation.spage	180	en_US
dc.citation.epage	186	en_US
dc.contributor.department	電控工程研究所	zh_TW
dc.contributor.department	Institute of Electrical and Control Engineering	en_US
dc.identifier.wosnumber	WOS:000168019300023	-
顯示於類別：	會議論文

文件中的檔案：

000168019300023.pdf

若為 zip 檔案，請下載檔案解壓縮後，用瀏覽器開啟資料夾中的 index.html 瀏覽全文。