Dynamic characteristics measurement system for optical scanning micromirror

Abstract

This paper describes the development of a novel, flexible, with appropriate accuracy dynamic characteristics measurement system for optical scanning micromirror. With the system, we can measure dynamic behaviors such as transient response, scan speed, scan angle, scan repeatability, and scan non-linearity of the scanning micromirror devices. Moreover, the optical system performances such as scan spot size and even scan spot intensity can also be obtained.