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| Rf loss and cross talk on extremely high resistivity (10K-1M Omega-cm) Si fabricated by ion implantation | 107 |
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| Rf loss and cross talk on extremely high resistivity (10K-1M Omega-cm) Si fabricated by ion implantation | 0 | 0 | 0 | 0 | 1 | 1 | 0 |
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