AlSixOy as a high transmittance embedded material for AttPSM and the correlation between the chemical compositions and optical properties of AlSixOy in 193 nm lithography

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Lin, CM	en_US
dc.date.accessioned	2014-12-08T15:27:05Z	-
dc.date.available	2014-12-08T15:27:05Z	-
dc.date.issued	2000	en_US
dc.identifier.isbn	4-89114-004-6	en_US
dc.identifier.uri	http://hdl.handle.net/11536/19309	-
dc.language.iso	en_US	en_US
dc.title	AlSixOy as a high transmittance embedded material for AttPSM and the correlation between the chemical compositions and optical properties of AlSixOy in 193 nm lithography	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS	en_US
dc.citation.spage	12	en_US
dc.citation.epage	13	en_US
dc.contributor.department	應用化學系	zh_TW
dc.contributor.department	Department of Applied Chemistry	en_US
dc.identifier.wosnumber	WOS:000166793600006	-
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