AlSixOy as a high transmittance embedded material for AttPSM and the correlation between the chemical compositions and optical properties of AlSixOy in 193 nm lithography

Full metadata record

DC Field	Value	Language
dc.contributor.author	Lin, CM	en_US
dc.date.accessioned	2014-12-08T15:27:05Z	-
dc.date.available	2014-12-08T15:27:05Z	-
dc.date.issued	2000	en_US
dc.identifier.isbn	4-89114-004-6	en_US
dc.identifier.uri	http://hdl.handle.net/11536/19309	-
dc.language.iso	en_US	en_US
dc.title	AlSixOy as a high transmittance embedded material for AttPSM and the correlation between the chemical compositions and optical properties of AlSixOy in 193 nm lithography	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS	en_US
dc.citation.spage	12	en_US
dc.citation.epage	13	en_US
dc.contributor.department	應用化學系	zh_TW
dc.contributor.department	Department of Applied Chemistry	en_US
dc.identifier.wosnumber	WOS:000166793600006	-
Appears in Collections:	Conferences Paper