OPTICAL-PROPERTIES OF ZRTIO4 FILMS GROWN BY RADIOFREQUENCY MAGNETRON SPUTTERING

doi:10.1063/1.359472

標題:	OPTICAL-PROPERTIES OF ZRTIO4 FILMS GROWN BY RADIOFREQUENCY MAGNETRON SPUTTERING
作者:	CHANG, DA LIN, P TSENG, TY 材料科學與工程學系 Department of Materials Science and Engineering
公開日期:	1-May-1995
URI:	http://dx.doi.org/10.1063/1.359472 http://hdl.handle.net/11536/1932
ISSN:	0021-8979
DOI:	10.1063/1.359472
期刊:	JOURNAL OF APPLIED PHYSICS
Volume:	77
Issue:	9
起始頁:	4445
結束頁:	4451
Appears in Collections:	Articles