標題: | An intelligent supervision system for the ion implementation in IC fabrication processes |
作者: | Shen, LC Hsu, PL 電控工程研究所 Institute of Electrical and Control Engineering |
關鍵字: | ion implantation;beam map;supervision;feature extraction;symptom analysis;fuzzy expert system |
公開日期: | 1998 |
摘要: | This paper presents a real-time intelligent supervision system for IC ion implantation processes. A hardware interface is developed to directly extract the features from the 2-D analog image signals of a beam map. A qualitative model for the beam scanning is then obtained and the symptoms of abnormal operations can be analyzed to achieve on-line diagnosis. Furthermore, a fuzzy expert system is developed to advise operators taking appropriate adjustment for the beam scanning. This supervisory system has been implemented on Eaten NV-6200 A/AV ion implanters at the Taiwan Semiconductor Manufacturing Company. Copyright (C) 1998 IFAC. |
URI: | http://hdl.handle.net/11536/19565 |
ISBN: | 0-08-042381-7 |
期刊: | (SAFEPROCESS'97): FAULT DETECTION, SUPERVISION AND SAFETY FOR TECHNICAL PROCESSES 1997, VOLS 1-3 |
起始頁: | 611 |
結束頁: | 616 |
顯示於類別: | 會議論文 |