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dc.contributor.authorMang, OYen_US
dc.contributor.authorSheen, CSen_US
dc.contributor.authorShie, JSen_US
dc.date.accessioned2014-12-08T15:27:23Z-
dc.date.available2014-12-08T15:27:23Z-
dc.date.issued1997en_US
dc.identifier.isbn0-7803-3748-4en_US
dc.identifier.issn1091-5281en_US
dc.identifier.urihttp://hdl.handle.net/11536/19628-
dc.description.abstractDevice parameters of thermal microsensors are essential for evaluating the sensor performances and their simulation modeling. We report an A.C. electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficience of resistance, thermal capacitance and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results obtained are compared with other methods.en_US
dc.language.isoen_USen_US
dc.titleParameter extraction of resistive thermal microsensors by AC electrical methoden_US
dc.typeProceedings Paperen_US
dc.identifier.journalIMTC/97 - IEEE INSTRUMENTATION & MEASUREMENT TECHNOLOGY CONFERENCE: SENSING, PROCESSING, NETWORKING, PROCEEDINGS VOLS 1 AND 2en_US
dc.citation.spage893en_US
dc.citation.epage897en_US
dc.contributor.department交大名義發表zh_TW
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentNational Chiao Tung Universityen_US
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:A1997BH95G00173-
Appears in Collections:Conferences Paper