Diagnostic techniques for polycrystalline thin film growth

Full metadata record

DC Field	Value	Language
dc.contributor.author	Cheng, KL	en_US
dc.contributor.author	Cheng, HC	en_US
dc.contributor.author	Yew, TR	en_US
dc.date.accessioned	2014-12-08T15:27:30Z	-
dc.date.available	2014-12-08T15:27:30Z	-
dc.date.issued	1996	en_US
dc.identifier.isbn	1-55899-309-6	en_US
dc.identifier.issn	0272-9172	en_US
dc.identifier.uri	http://hdl.handle.net/11536/19776	-
dc.language.iso	en_US	en_US
dc.title	Diagnostic techniques for polycrystalline thin film growth	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING II	en_US
dc.citation.volume	406	en_US
dc.citation.spage	157	en_US
dc.citation.epage	162	en_US
dc.contributor.department	電子工程學系及電子研究所	zh_TW
dc.contributor.department	Department of Electronics Engineering and Institute of Electronics	en_US
dc.identifier.wosnumber	WOS:A1996BF20G00024	-
Appears in Collections:	Conferences Paper