Diagnostic techniques for polycrystalline thin film growth

Title:	Diagnostic techniques for polycrystalline thin film growth
Authors:	Cheng, KL Cheng, HC Yew, TR 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	1996
URI:	http://hdl.handle.net/11536/19776
ISBN:	1-55899-309-6
ISSN:	0272-9172
Journal:	DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING II
Volume:	406
Begin Page:	157
End Page:	162
Appears in Collections:	Conferences Paper