標題: Characterization and optimization of NO-nitrided gate oxide by RTP
作者: Sun, SC
Chen, CH
Yen, DLW
Lin, CJ
奈米中心
Nano Facility Center
公開日期: 1995
URI: http://hdl.handle.net/11536/19962
ISBN: 0-7803-2700-4
期刊: INTERNATIONAL ELECTRON DEVICES MEETING, 1995 - IEDM TECHNICAL DIGEST
起始頁: 687
結束頁: 690
Appears in Collections:Conferences Paper