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dc.contributor.authorLOONG, WAen_US
dc.contributor.authorYEH, CHen_US
dc.contributor.authorSHY, SLen_US
dc.date.accessioned2014-12-08T15:27:43Z-
dc.date.available2014-12-08T15:27:43Z-
dc.date.issued1995en_US
dc.identifier.isbn0-8194-1788-2en_US
dc.identifier.urihttp://hdl.handle.net/11536/19976-
dc.identifier.urihttp://dx.doi.org/10.1117/12.209275en_US
dc.language.isoen_USen_US
dc.subjectPHASE-SHIFTING MASKen_US
dc.subjectHALF-TONEen_US
dc.subjectRIMen_US
dc.subjectHALF-TONE-RIMen_US
dc.subjectSIMULATIONen_US
dc.subjectOFF-AXIS ILLUMINATIONen_US
dc.subjectSUBMICRON LITHOGRAPHYen_US
dc.titleSIMULATION STUDY OF A NEW PHASE-SHIFTING MASK - HALFTONE-RIMen_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1117/12.209275en_US
dc.identifier.journalOPTICAL/LASER MICROLITHOGRAPHY VIIIen_US
dc.citation.volume2440en_US
dc.citation.spage448en_US
dc.citation.epage457en_US
dc.contributor.department應用化學系zh_TW
dc.contributor.departmentDepartment of Applied Chemistryen_US
dc.identifier.wosnumberWOS:A1995BD19S00039-
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