Rapid thermal chemical vapor deposition of in-situ nitrogen-doped polysilicon for dual gate CMOS

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DC Field	Value	Language
dc.contributor.author	Sun, SC	en_US
dc.contributor.author	Wang, LS	en_US
dc.contributor.author	Yeh, FL	en_US
dc.contributor.author	Chen, CH	en_US
dc.date.accessioned	2014-12-08T15:27:48Z	-
dc.date.available	2014-12-08T15:27:48Z	-
dc.date.issued	1995	en_US
dc.identifier.isbn	0-7803-2602-4	en_US
dc.identifier.uri	http://hdl.handle.net/11536/20049	-
dc.identifier.uri	http://dx.doi.org/10.1109/VLSIT.1995.520887	en_US
dc.language.iso	en_US	en_US
dc.title	Rapid thermal chemical vapor deposition of in-situ nitrogen-doped polysilicon for dual gate CMOS	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.doi	10.1109/VLSIT.1995.520887	en_US
dc.identifier.journal	1995 SYMPOSIUM ON VLSI TECHNOLOGY: DIGEST OF TECHNICAL PAPERS	en_US
dc.citation.spage	121	en_US
dc.citation.epage	122	en_US
dc.contributor.department	奈米中心	zh_TW
dc.contributor.department	Nano Facility Center	en_US
dc.identifier.wosnumber	WOS:A1995BE44J00061	-
Appears in Collections:	Conferences Paper

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