CHARACTERIZATION OF CHEMICAL-MECHANICAL POLISHING DIELECTRICS FOR MULTILEVEL METALLIZATION

標題:	CHARACTERIZATION OF CHEMICAL-MECHANICAL POLISHING DIELECTRICS FOR MULTILEVEL METALLIZATION
作者:	SUN, SC YEH, FL TIEN, HZ 奈米中心 Nano Facility Center
公開日期:	1994
URI:	http://hdl.handle.net/11536/20056
ISBN:	1-55899-237-5
ISSN:	0272-9172
期刊:	ADVANCED METALLIZATION FOR DEVICES AND CIRCUITS - SCIENCE, TECHNOLOGY AND MANUFACTURABILITY
Volume:	337
起始頁:	139
結束頁:	144
顯示於類別：	會議論文