CHARACTERIZATION OF CHEMICAL-MECHANICAL POLISHING DIELECTRICS FOR MULTILEVEL METALLIZATION

Title:	CHARACTERIZATION OF CHEMICAL-MECHANICAL POLISHING DIELECTRICS FOR MULTILEVEL METALLIZATION
Authors:	SUN, SC YEH, FL TIEN, HZ 奈米中心 Nano Facility Center
Issue Date:	1994
URI:	http://hdl.handle.net/11536/20056
ISBN:	1-55899-237-5
ISSN:	0272-9172
Journal:	ADVANCED METALLIZATION FOR DEVICES AND CIRCUITS - SCIENCE, TECHNOLOGY AND MANUFACTURABILITY
Volume:	337
Begin Page:	139
End Page:	144
Appears in Collections:	Conferences Paper