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dc.contributor.authorWU, WFen_US
dc.contributor.authorCHIOU, BSen_US
dc.date.accessioned2014-12-08T15:27:50Z-
dc.date.available2014-12-08T15:27:50Z-
dc.date.issued1994en_US
dc.identifier.isbn0-8194-1445-Xen_US
dc.identifier.urihttp://hdl.handle.net/11536/20081-
dc.identifier.urihttp://dx.doi.org/10.1117/12.175003en_US
dc.language.isoen_USen_US
dc.titleFABRICATION AND CHARACTERISTICS OF RF MAGNETRON-SPUTTERED ITO THIN-FILMSen_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1117/12.175003en_US
dc.identifier.journalDESIGN, SIMULATION, AND FABRICATION OF OPTOELECTRONIC DEVICES AND CIRCUITSen_US
dc.citation.volume2150en_US
dc.citation.spage319en_US
dc.citation.epage325en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:A1994BA43F00036-
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