標題: A NOVEL APPROACH FOR LEAKAGE CURRENT REDUCTION OF LPCVD TA(2)O(5) AND TIO(2) FILMS BY RAPID THERMAL N(2)O ANNEALING
作者: SUN, SC
CHEN, TF
奈米中心
Nano Facility Center
公開日期: 1994
URI: http://hdl.handle.net/11536/20109
ISBN: 0-7803-2111-1
期刊: INTERNATIONAL ELECTRON DEVICES MEETING 1994 - IEDM TECHNICAL DIGEST
起始頁: 333
結束頁: 336
Appears in Collections:Conferences Paper