A NOVEL APPROACH FOR LEAKAGE CURRENT REDUCTION OF LPCVD TA(2)O(5) AND TIO(2) FILMS BY RAPID THERMAL N(2)O ANNEALING

標題:	A NOVEL APPROACH FOR LEAKAGE CURRENT REDUCTION OF LPCVD TA(2)O(5) AND TIO(2) FILMS BY RAPID THERMAL N(2)O ANNEALING
作者:	SUN, SC CHEN, TF 奈米中心 Nano Facility Center
公開日期:	1994
URI:	http://hdl.handle.net/11536/20109
ISBN:	0-7803-2111-1
期刊:	INTERNATIONAL ELECTRON DEVICES MEETING 1994 - IEDM TECHNICAL DIGEST
起始頁:	333
結束頁:	336
Appears in Collections:	Conferences Paper