A NOVEL APPROACH FOR LEAKAGE CURRENT REDUCTION OF LPCVD TA(2)O(5) AND TIO(2) FILMS BY RAPID THERMAL N(2)O ANNEALING

Title:	A NOVEL APPROACH FOR LEAKAGE CURRENT REDUCTION OF LPCVD TA(2)O(5) AND TIO(2) FILMS BY RAPID THERMAL N(2)O ANNEALING
Authors:	SUN, SC CHEN, TF 奈米中心 Nano Facility Center
Issue Date:	1994
URI:	http://hdl.handle.net/11536/20109
ISBN:	0-7803-2111-1
Journal:	INTERNATIONAL ELECTRON DEVICES MEETING 1994 - IEDM TECHNICAL DIGEST
Begin Page:	333
End Page:	336
Appears in Collections:	Conferences Paper