| 標題: | THE ELLIPSOMETRIC MEASUREMENTS ON SIO2 BY INTENSITY RATIO TECHNIQUE |
| 作者: | CHAO, YF WEI, CS LEE, WC LIN, SC 交大名義發表 National Chiao Tung University |
| 關鍵字: | ELLIPSOMETRY;THIN FILM |
| 公開日期: | 1994 |
| URI: | http://hdl.handle.net/11536/20125 http://dx.doi.org/10.1117/12.186666 |
| ISBN: | 0-8194-1589-8 |
| DOI: | 10.1117/12.186666 |
| 期刊: | POLARIZATION ANALYSIS AND MEASUREMENT II |
| Volume: | 2265 |
| 起始頁: | 171 |
| 結束頁: | 180 |
| 顯示於類別: | 會議論文 |

