Thermal emission at near-infrared wavelengths from three-dimensional copper photonic crystals

Abstract

A three-dimensional copper photonic crystal was fabricated with the high compatibility process, damascene copper interconnections technique. The reflectance and transmittance spectra of this structure were measured with the Fourier-transform infrared spectroscopy and simulated with the 3 D finite-difference time-domain method. From the experiment data, it is shown that this structure exhibits a large photonic bandgap from mid-infrared regime to lambda = 1.95 mu m. At a heating temperature of 420 degrees C, it is observed that thermal emission is enhanced near the bandedge lambda = 1.71 mu m and suppressed in the bandgap region. This is attributed to the enhancement of photonic density of states near the bandedge. (C) 2011 American Institute of Physics. [doi:10.1063/1.3625263]