BOND-STRUCTURE CHANGES OF LIQUID-PHASE DEPOSITED OXIDE (SIO2-XFX) ON N2 ANNEALING

doi:10.1063/1.113603

Title:	BOND-STRUCTURE CHANGES OF LIQUID-PHASE DEPOSITED OXIDE (SIO2-XFX) ON N2 ANNEALING
Authors:	YEH, CF CHEN, CL LUR, W YEN, PW 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	20-Feb-1995
URI:	http://dx.doi.org/10.1063/1.113603 http://hdl.handle.net/11536/2045
ISSN:	0003-6951
DOI:	10.1063/1.113603
Journal:	APPLIED PHYSICS LETTERS
Volume:	66
Issue:	8
Begin Page:	938
End Page:	940
Appears in Collections:	Articles