標題: CMOS-MEMS accelerometer with differential LC-tank oscillators
作者: Chiu, Yi
Hong, Hao-Chiao
Wu, Po-Chih
電機資訊學士班
Undergraduate Honors Program of Electrical Engineering and Computer Science
公開日期: 2012
摘要: This paper presents a CMOS-MEMS accelerometer based on differential LC-tank oscillators. Two LC-tank oscillators composed of differential MEMS capacitors and suspended inductors were designed and fabricated by standard TSMC 0.18 mu m CMOS processes and post-CMOS dry etching. The outputs of the differential oscillators are mixed and the output frequency of the mixer is proportional to the capacitance change caused by external acceleration. The device has been characterized and has a mechanical resonance frequency of 3.3 kHz, sensitivity of 3.7 MHz/g, and nonlinearity of 1.8%.
URI: http://hdl.handle.net/11536/21607
ISBN: 978-1-4577-1766-6
ISSN: 1930-0395
期刊: 2012 IEEE SENSORS PROCEEDINGS
起始頁: 166
結束頁: 169
Appears in Collections:Conferences Paper