標題: A Novel Suspension Design for MEMS Sensing Device to Eliminate Planar Spring Constants Mismatch
作者: Jiang, Kai-Yu
Chen, He-Ling
Hsu, Wensyang
Lee, Yueh-Kang
Miao, Yen-Wu
Shieh, Yi-Chueh
Hung, Chen-Yuan
機械工程學系
Department of Mechanical Engineering
公開日期: 2012
摘要: This paper presents a new suspension design for planar MEMS sensing devices. The new design includes four coil springs which are symmetrically arranged with respect to the center of the proof mass with 90-degree orientation difference. The proposed coil spring design is found to take less area to achieve similar spring constant than the conventional serpentine spring design. Furthermore, the proposed symmetrical-to-center arrangement on suspension can reduce spring constants mismatch between X and Y axes, even under beam width deviation due to fabrication resolution. This concept is realized and verified by experimental results from two-axis capacitive accelerometers through a polysilicon-based CMOS fabrication platform.
URI: http://hdl.handle.net/11536/21609
ISBN: 978-1-4577-1766-6
ISSN: 1930-0395
期刊: 2012 IEEE SENSORS PROCEEDINGS
起始頁: 558
結束頁: 561
顯示於類別:會議論文