標題: | A Novel Suspension Design for MEMS Sensing Device to Eliminate Planar Spring Constants Mismatch |
作者: | Jiang, Kai-Yu Chen, He-Ling Hsu, Wensyang Lee, Yueh-Kang Miao, Yen-Wu Shieh, Yi-Chueh Hung, Chen-Yuan 機械工程學系 Department of Mechanical Engineering |
公開日期: | 2012 |
摘要: | This paper presents a new suspension design for planar MEMS sensing devices. The new design includes four coil springs which are symmetrically arranged with respect to the center of the proof mass with 90-degree orientation difference. The proposed coil spring design is found to take less area to achieve similar spring constant than the conventional serpentine spring design. Furthermore, the proposed symmetrical-to-center arrangement on suspension can reduce spring constants mismatch between X and Y axes, even under beam width deviation due to fabrication resolution. This concept is realized and verified by experimental results from two-axis capacitive accelerometers through a polysilicon-based CMOS fabrication platform. |
URI: | http://hdl.handle.net/11536/21609 |
ISBN: | 978-1-4577-1766-6 |
ISSN: | 1930-0395 |
期刊: | 2012 IEEE SENSORS PROCEEDINGS |
起始頁: | 558 |
結束頁: | 561 |
顯示於類別: | 會議論文 |