Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Wang, Chun-Chieh | en_US |
dc.contributor.author | Fan, Long-Sheng | en_US |
dc.contributor.author | Wen, Kuei-Ann | en_US |
dc.date.accessioned | 2014-12-08T15:30:11Z | - |
dc.date.available | 2014-12-08T15:30:11Z | - |
dc.date.issued | 2012 | en_US |
dc.identifier.isbn | 978-1-4577-1766-6 | en_US |
dc.identifier.issn | 1930-0395 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/21622 | - |
dc.description.abstract | A monolithic accelerometer with integrated capacitance to digital readout circuit implemented in mixed-signal MEMS process is proposed to demonstrate sensor-to-bit integration. The sensing range is from -5g to 5g and the variation of the capacitance is from 441.2fF to 470fF. The sensitivity of the accelerometer is 2.88fF/g. The capacitance value of the sensing range is readout by the capacitance to digital circuit to readout. The capacitance to time circuit of the sensitivity is 6.94us/pF which is equivalent to 20ns/1bit. The digital output can be obtained without analog to digital module, and thus with power saving advantage, the output signal can be directly interface to digital signal process. | en_US |
dc.language.iso | en_US | en_US |
dc.title | Integrated Accelerometer with Capacitance to Digital Interface Circuit Design based on monolithic 0.18 mu m CMOS MEMS technology | en_US |
dc.type | Proceedings Paper | en_US |
dc.identifier.journal | 2012 IEEE SENSORS PROCEEDINGS | en_US |
dc.citation.spage | 1790 | en_US |
dc.citation.epage | 1793 | en_US |
dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
dc.identifier.wosnumber | WOS:000315671100428 | - |
Appears in Collections: | Conferences Paper |