A Monolithic CMOS MEMS Accelerometer with Low Noise Gain Tunable Interface in 0.18 mu m CMOS MEMS Technology

Abstract

A monolithic capacitance accelerometer is fabricated in 0.18 mu m ASIC-compatible CMOS MEMS technology and, with the assistant of universal sensing system being developed in the proposed work. The new approach combines the Dual-Chopper amplifier and Correlated Double Sampling to alleviate 1/f noise and DC offset. The total noise equivalent acceleration is 13.49ug/root Hz under 500 Hz. The tunable sensitivity can be adjusted from 324.8 mV/fF to 17807.11mV/fF (differential mode) by the fully-differential variable gain amplifier (VGA).