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dc.contributor.authorWang, Chun-Chiehen_US
dc.contributor.authorFan, Long-Shengen_US
dc.contributor.authorWen, Kuei-Annen_US
dc.date.accessioned2014-12-08T15:30:11Z-
dc.date.available2014-12-08T15:30:11Z-
dc.date.issued2012en_US
dc.identifier.isbn978-1-4577-1766-6en_US
dc.identifier.issn1930-0395en_US
dc.identifier.urihttp://hdl.handle.net/11536/21622-
dc.description.abstractA monolithic accelerometer with integrated capacitance to digital readout circuit implemented in mixed-signal MEMS process is proposed to demonstrate sensor-to-bit integration. The sensing range is from -5g to 5g and the variation of the capacitance is from 441.2fF to 470fF. The sensitivity of the accelerometer is 2.88fF/g. The capacitance value of the sensing range is readout by the capacitance to digital circuit to readout. The capacitance to time circuit of the sensitivity is 6.94us/pF which is equivalent to 20ns/1bit. The digital output can be obtained without analog to digital module, and thus with power saving advantage, the output signal can be directly interface to digital signal process.en_US
dc.language.isoen_USen_US
dc.titleIntegrated Accelerometer with Capacitance to Digital Interface Circuit Design based on monolithic 0.18 mu m CMOS MEMS technologyen_US
dc.typeProceedings Paperen_US
dc.identifier.journal2012 IEEE SENSORS PROCEEDINGSen_US
dc.citation.spage1790en_US
dc.citation.epage1793en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000315671100428-
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