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dc.contributor.authorCHEN, CFen_US
dc.contributor.authorCHEN, SHen_US
dc.contributor.authorHONG, TMen_US
dc.contributor.authorLEU, JSen_US
dc.date.accessioned2014-12-08T15:03:39Z-
dc.date.available2014-12-08T15:03:39Z-
dc.date.issued1994-12-15en_US
dc.identifier.issn0040-6090en_US
dc.identifier.urihttp://hdl.handle.net/11536/2176-
dc.description.abstractDiamond films are the optical choice for IR window applications. Polycrystalline diamond films were synthesized in this study by microwave-plasma-assisted chemical vapour deposition (PACVD) using CH4 + CO2 as reactive gases. The primary purpose of this study is to determine the effect of the deposition conditions on the optical properties of PACVD diamond films. Room temperature optical properties of free-standing diamond films were studied by Fourier transform IR spectroscopy. Experimental results indicate that the refractive index of diamond films is comparable with that of natural diamond. The scattering loss caused by the rough surface of as-grown diamond film was reduced using a two-step process and polishing techniques. The resulting reduction in scattering loss increased the transmission intensity. For low temperature deposited diamond film the intensity of absorption due to carbon-hydrogen stretch bands was higher than that for film deposited at a high temperature. IR spectra are fitted with simulated spectra to determine the background absorption caused by the amorphous carbon contained in the films. Additionally, the background absorption of low temperature deposited diamond film was found to be larger than that of a diamond film deposited at 850 degrees C.en_US
dc.language.isoen_USen_US
dc.subjectCHEMICAL VAPOR DEPOSITIONen_US
dc.subjectDIAMONDen_US
dc.subjectFOURIER TRANSFORM INFRARED SPECTROSCOPYen_US
dc.subjectMETHANEen_US
dc.titleOPTICAL CHARACTERIZATION OF DIAMOND SYNTHESIZED USING CH4-CO2 GAS-MIXTURES WITHOUT SUPPLYING HYDROGEN GASen_US
dc.typeArticleen_US
dc.identifier.journalTHIN SOLID FILMSen_US
dc.citation.volume253en_US
dc.citation.issue1-2en_US
dc.citation.spage162en_US
dc.citation.epage167en_US
dc.contributor.department交大名義發表zh_TW
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentNational Chiao Tung Universityen_US
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.identifier.wosnumberWOS:A1994PX35600030-
dc.citation.woscount4-
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