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dc.contributor.authorSu, Yi-Shengen_US
dc.contributor.authorWu, Tsung-Chengen_US
dc.contributor.authorWang, Chung-Hsuanen_US
dc.contributor.authorChang, Min-Kuanen_US
dc.date.accessioned2014-12-08T15:32:09Z-
dc.date.available2014-12-08T15:32:09Z-
dc.date.issued2011-06-15en_US
dc.identifier.issn1041-1135en_US
dc.identifier.urihttp://dx.doi.org/10.1109/LPT.2011.2140368en_US
dc.identifier.urihttp://hdl.handle.net/11536/22627-
dc.description.abstractIn this letter, a novel design of two-dimensional (2-D) zero reference codes (ZRCs) based on parametric minimum cross entropy (PMCE) is proposed to generate 2-D optical zero reference signals (ZRSs) with low second maximum for grating alignment systems. An optical ZRS is necessary to obtain an absolute measurement in grating alignment systems. A method to acquire an optical ZRS is by means of illuminating two identical superimposed ZRCs. Because the movement between the two ZRCs is in two-axis, 2-D ZRCs are required. However, they are hard to design due to the high computational complexity, especially for large codes. The proposed PMCE method not only reduces the second maximum of 2-D optical ZRSs, but also decreases the computational complexity. Simulation results indicate that there are 8.33%similar to 22.22% reductions in the second maximum of several 2-D optical ZRSs, as compared with those of the recently proposed cross-entropy (CE) method. The PMCE method proves to be a powerful tool for the design of 2-D ZRCs.en_US
dc.language.isoen_USen_US
dc.subjectAutocorrelation functionen_US
dc.subjectcombinatorial optimizationen_US
dc.subjectoptical position measurementen_US
dc.subjectoptimization methoden_US
dc.subjectparametric minimum cross entropy (PMCE)en_US
dc.subjecttwo-dimensional (2-D) optical zero reference signal (ZRS)en_US
dc.subjecttwo-dimensional (2-D) zero reference code (ZRC)en_US
dc.titleGeneration of Two-Dimensional Optical Reference Signals Based on Parametric Minimum Cross Entropyen_US
dc.typeArticleen_US
dc.identifier.doi10.1109/LPT.2011.2140368en_US
dc.identifier.journalIEEE PHOTONICS TECHNOLOGY LETTERSen_US
dc.citation.volume23en_US
dc.citation.issue12en_US
dc.citation.spage813en_US
dc.citation.epage815en_US
dc.contributor.department電機工程學系zh_TW
dc.contributor.departmentDepartment of Electrical and Computer Engineeringen_US
dc.identifier.wosnumberWOS:000290997100013-
dc.citation.woscount2-
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