Investigation of p-type junction-less independent double-gate poly-Si nano-strip transistors

Abstract

In this study, novel independent double-gate (IDG) junction-less (J-less) polycrystalline silicon (poly-Si) nano-strip transistors have been fabricated and investigated. Inversion-mode (IM) IDG poly-Si nano-strip transistors with the undoped channel have also been fabricated for comparison. The experimental data show the superior on-state current of J-less transistors over that of IM transistors mainly due to the reduction of the channel resistance (R-ch). However, the drain-induced barrier lowering of the J-less transistors is larger than that of IM transistors but the double-gate (DG) configuration can mitigate this problem to some extent. Besides, the subthreshold swing and its fluctuation of the J-less transistors are worse than those of IM transistors under the single-gate operation. Fortunately, this issue can be significantly improved by the aid of DG configuration according to our experimental results. We also demonstrate the possibility of changing the threshold voltage (V-th) under IDG operation for the J-less IDG nano-strip transistors.