完整後設資料紀錄
DC 欄位 | 值 | 語言 |
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dc.contributor.author | Kao, Chyuan Haur | en_US |
dc.contributor.author | Chen, Hsiang | en_US |
dc.contributor.author | Lee, Ming Ling | en_US |
dc.contributor.author | Liu, Che Chun | en_US |
dc.contributor.author | Ueng, Herng-Yih | en_US |
dc.contributor.author | Chu, Yu Cheng | en_US |
dc.contributor.author | Chen, Ching Bang | en_US |
dc.contributor.author | Chang, Kow Ming | en_US |
dc.date.accessioned | 2014-12-08T15:34:56Z | - |
dc.date.available | 2014-12-08T15:34:56Z | - |
dc.date.issued | 2014-04-01 | en_US |
dc.identifier.issn | 0925-4005 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1016/j.snb.2013.12.103 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/23751 | - |
dc.description.abstract | A CeO2-based multi-analyte electrolyte-insulator-semiconductor (EIS) biosensor has been fabricated on silicon substrate. To enhance the material quality and sensing performance, annealing treatment in N-2 and O-2 ambient has been incorporated. To examine the annealing effects, material analyses were conducted using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) to identify optimal treatment conditions. Furthermore, sensing performance for various ions of Na+, K+, urea, and glucose has also been tested. Results indicate that the membrane annealed at 800 degrees C in O-2 ambience exhibited a better performance with higher multianalyte sensitivity and a lower drift rate compared with the membrane annealed in N-2 ambience. Oxygen in O-2 ambience may cause stronger reflow and fill in the oxygen vacancy so that the material properties and sensing capability can be improved in O-2 annealing ambience. (C) 2014 Elsevier B.V. All rights reserved. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | CeO2 | en_US |
dc.subject | O-2 and N-2 annealing | en_US |
dc.subject | Electrolyte-insulator-semiconductor | en_US |
dc.subject | Material quality | en_US |
dc.subject | Sensing performance | en_US |
dc.title | Effects of N-2 and O-2 annealing on the multianalyte biosensing characteristics of CeO2-based electrolyte-insulator-semiconductor structures | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1016/j.snb.2013.12.103 | en_US |
dc.identifier.journal | SENSORS AND ACTUATORS B-CHEMICAL | en_US |
dc.citation.volume | 194 | en_US |
dc.citation.issue | en_US | |
dc.citation.spage | 503 | en_US |
dc.citation.epage | 510 | en_US |
dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
dc.identifier.wosnumber | WOS:000331575400066 | - |
dc.citation.woscount | 0 | - |
顯示於類別: | 期刊論文 |