Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate

標題:	Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate
作者:	Do, Hien Van-Truong Dai Tian, Jr-Sheng Yen, Tzu-Chun Chang, Li 材料科學與工程學系電子工程學系及電子研究所 Department of Materials Science and Engineering Department of Electronics Engineering and Institute of Electronics
關鍵字:	Epitaxial titanium oxynitride;Nanoindentation;Mechanical properties
公開日期:	25-七月-2014
摘要:	We investigate the effect of chemical composition and residual stress on the mechanical properties of high-quality epitaxial TiNxOy films deposited on MgO(001) substrates by using nanoindentation. The lattice parameters and residual strain/stress of TiNxOy films decrease as oxygen concentration increases. Hardness and Young\'s modulus determined by nanoindentation are about 17-26 GPa and 355-430 GPa, respectively, which vary with chemical composition and residual stress. (C) 2014 Elsevier B.V. All rights reserved.
URI:	http://dx.doi.org/10.1016/j.surfcoat.2014.03.058 http://hdl.handle.net/11536/24608
ISSN:	0257-8972
DOI:	10.1016/j.surfcoat.2014.03.058
期刊:	SURFACE & COATINGS TECHNOLOGY
Volume:	251
Issue:
起始頁:	1
結束頁:	6
顯示於類別：	期刊論文

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