标题: A rapid synthesis/growth process producing massive ZnO nanowires for humidity and gas sensing
作者: Hsu, Nai-Feng
Chung, Tien-Kan
机械工程学系
Department of Mechanical Engineering
公开日期: 1-九月-2014
摘要: We report a rapid and simple process to massively synthesize/grow ZnO nanowires capable of manufacturing massive humidity/gas sensors. The process utilizing a chemical solution deposition with an annealing process (heating in vacuum without gas) is capable of producing ZnO nanowires within an hour. Through depositing the ZnO nanowires on the top of a Pt-interdigitated-electrode/SiO2/Si-Wafer, a humidity/gas-hybrid sensor is fabricated. The humidity sensitivity (i.e., ratio of the electrical resistance of the sensor at 11-95 % relative humidity level) is approximately 10(4). The response and recovery time with the humidity changing from 11 to 95 % directly and reversely is 6 and 10 s, respectively. The gas sensitivity (i.e., ratio of electrical resistance of the sensor under the air to vaporized ethanol) is increased from 2 to 56 when the concentration of the ethanol is increased from 40 to 600 ppm. Both the response and recovery times are less than 15 s for the gas sensor. These results show the sensor utilizing the nanowires exhibits excellent humidity and gas sensing.
URI: http://dx.doi.org/10.1007/s00339-013-8217-y
http://hdl.handle.net/11536/25034
ISSN: 0947-8396
DOI: 10.1007/s00339-013-8217-y
期刊: APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume: 116
Issue: 3
起始页: 1261
结束页: 1269
显示于类别:Articles


文件中的档案:

  1. 000340583500048.pdf

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.