标题: | A rapid synthesis/growth process producing massive ZnO nanowires for humidity and gas sensing |
作者: | Hsu, Nai-Feng Chung, Tien-Kan 机械工程学系 Department of Mechanical Engineering |
公开日期: | 1-九月-2014 |
摘要: | We report a rapid and simple process to massively synthesize/grow ZnO nanowires capable of manufacturing massive humidity/gas sensors. The process utilizing a chemical solution deposition with an annealing process (heating in vacuum without gas) is capable of producing ZnO nanowires within an hour. Through depositing the ZnO nanowires on the top of a Pt-interdigitated-electrode/SiO2/Si-Wafer, a humidity/gas-hybrid sensor is fabricated. The humidity sensitivity (i.e., ratio of the electrical resistance of the sensor at 11-95 % relative humidity level) is approximately 10(4). The response and recovery time with the humidity changing from 11 to 95 % directly and reversely is 6 and 10 s, respectively. The gas sensitivity (i.e., ratio of electrical resistance of the sensor under the air to vaporized ethanol) is increased from 2 to 56 when the concentration of the ethanol is increased from 40 to 600 ppm. Both the response and recovery times are less than 15 s for the gas sensor. These results show the sensor utilizing the nanowires exhibits excellent humidity and gas sensing. |
URI: | http://dx.doi.org/10.1007/s00339-013-8217-y http://hdl.handle.net/11536/25034 |
ISSN: | 0947-8396 |
DOI: | 10.1007/s00339-013-8217-y |
期刊: | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING |
Volume: | 116 |
Issue: | 3 |
起始页: | 1261 |
结束页: | 1269 |
显示于类别: | Articles |
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